In geothermal and oil production, the temperature usually exceeds 200 ℃, which is higher than the maximum temperature that the conventional microchip used in the equipment can withstand. In the pressure measurement of this environment, due to the temperature status of the integrated circuit, the traditional Pressure sensor Recently, it is reported that researchers from the Fraunhofer Institute for microelectronic circuits and systems (IMS) in Germany have developed a new high temperature process, which can produce ultra compact microchips, which can work normally at temperatures up to 300 ℃.
The traditional CMOS chip can withstand the high temperature of 250 ℃, but its performance and reliability will decline rapidly. Another method is to implement continuous cooling of thermally sensitive microchips, which is difficult to achieve. In addition, there are specialized high-temperature chips on the market, but the size is too large (the minimum size is also up to 1 micron).
The size of the microchip developed by IMS is only 0.35 μ m, which is far smaller than the existing high-temperature chips, and still retains its due functions.
In order to develop a heat-resistant microchip, a special high-temperature silicon insulator (SOI) CMOS process is used to prevent the generation of leakage current which affects the operation of the chip. In addition, the high temperature sensitivity of its working aluminum chip is also lower than that of the commonly used tungsten metal.
In addition to being used for geothermal energy, natural gas or oil production, the microchip can also be used in the aviation industry, such as being placed as close as possible to a turbine engine to record its operating status and ensure its more efficient and reliable operation. The commercialization of high temperature integrated circuit will greatly reduce the volume of the transmitter, and at the same time, it can be extended High temperature pressure sensor Application field, improve product performance. This article originates from Zetian sensing Please keep the source.