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Development of a new type of thin film temperature and pressure sensor

Published on: January 18, 2020 by Zetian sensing

It's called the "third generation sensor." Thin film pressure sensor It is a new type of sensor developed for the development of new weapons and equipment after the 1980s, and its excellent performance in harsh environment has been paid attention to by all countries in the world.

Thin film high temperature pressure sensor: in supersonic aircraft, the hydraulic system is one of the key systems of the aircraft. The hydraulic system uses hydraulic oil as the working medium. Once the pressure of the hydraulic oil disappears, the aircraft will not be able to control and land the aircraft. The developed product is used to measure high temperature fluids up to 200 ℃. The main difficulties are high temperature, high pressure, strong vibration and electromagnetic interference. The research route is to solve the problem of high temperature resistance of sensitive materials and thin films and solve the problem of strong electromagnetic interference based on the existing technology.

 Thin film high temperature pressure sensor

Thin film high temperature heat flow sensor: used to measure the heat generated by the friction between aircraft shell and air in hypersonic flight. More than 300 sensors are needed in airborne test to measure the heat condition of different shape parts of the shell. In the health management system of the finalized aircraft, multiple sensors are still needed to monitor the heat status of key parts. The results can also be used in the design and test of warhead materials. The main difficulty of its development is that the working temperature is as high as 1200 ℃, the response time is less than 100 μ s, and the volume is required to be light and convenient for fastening and installing with the casing. The research route is to use ion beam sputtering and dry etching technology to fabricate thermistor thin film bridge on ceramic substrate, and then deposit different thickness of thermal resistance film on different bridge arms to sense the accumulated heat and transient heat respectively. The transient temperature in a certain area is output through the bridge, and then converted into heat signal output by microcircuit.

Thin film thrust sensor: in supersonic aircraft, there are many reaction force control systems, air orbit change and attitude control systems. These systems regulate and control the attitude and orbit of the aircraft by injecting high-pressure gas. The thin-film thrust sensor is used to measure the reverse thrust generated by gas injection. The main difficulty in the development of the sensor is that the response time should reach 2ms, and it can measure the high-speed pulsating gas without producing the self vibration effect. The research route is to design a kind of special-shaped cylindrical support strain strain strain strain strain strain strain strain strain strain strain film bridge on polyimide film. The strain bridge is bonded to the cylindrical strain to form a sensor, so as to avoid the resonance problem of traditional cantilever beam sensor when subjected to repeated pulse force. At the same time, the cylinder center can directly pass through the gas nozzle to solve the traditional problem In order to improve the veracity and accuracy of measurement, it is necessary to bend the nozzle.

Thin film integrated high temperature pressure and temperature sensor: used to test the pressure and temperature in the gas cylinder and gas pipeline of RCS system on the aircraft. RCS system is used for aircraft attitude adjustment. The pressure in the high-pressure gas cylinder is as high as 60MPa, and the pressure in the gas pipeline is 5MPa. Because opening multiple interfaces on the high-pressure gas cylinder will affect the strength of the cylinder, it is necessary to measure the pressure and temperature simultaneously on one interface, so as to reduce the volume of the product and reduce the weight of the whole product. Each frame has about 4-8 channels to install the product. The main difficulties of its development are high pressure, small size, strong environmental vibration and strong electromagnetic interference. The research route is to use ion beam sputtering and dry etching technology to fabricate pressure sensitive bridge and thermal thin film resistor on stainless steel elastic substrate at the same time. Multilayer stable thin films are plated on the elastic substrate to form pressure temperature sensitive components, and then converted into accurate standard signal output through microcircuit.

Film fast response temperature sensor: used to measure hydraulic oil temperature of aircraft hydraulic system. The main difficulty in the development of the sensor is that the sensitive element should be designed in a protective shell which can withstand 40MPa high pressure, and the response time should be less than 100ms. The research route is to use ion beam sputtering and dry etching technology to fabricate thermistor thin film resistor on the substrate with fast heat transfer. This article originates from Zetian sensing Please keep the source.