Since the 21st century, microelectronics technology, large-scale integrated circuit technology and computer technology have reached a mature stage, optoelectronic technology has entered the middle stage of development, and new technologies such as superconducting electron will enter the initial stage of development, all of which provide development conditions for the development of a new generation of sensors. It can be predicted that: 1) tent technology will develop rapidly and become the core technology of the new generation of micro sensors and micro systems. It is a high-tech with revolutionary changes in the field of sensor technology in the 21st century. ② The development of new sensitive materials will be accelerated, and microelectronics, optoelectronics, biochemistry, information processing disciplines and technologies will penetrate and comprehensively utilize each other. It is expected that a number of advanced sensors will be developed. ③ The development of sensors, sensors and sensors is becoming the main trend of sensor systems. ④ Networked sensors will appear. The general trend of sensor and sensor development is integration, multi-function, intelligence and systematization. At present, the market demand is diversified, and the requirements for pressure sensor chip products are constantly improving, which has brought great enthusiasm to the overall development of the industry. The main factors influencing the development of pressure sensor chip (pressure sensitive element) industry include national policy guidance, related industry development, industry technology development, social demand change, etc. national policy and social demand are the main driving forces of the development of pressure sensor chip.
1、 National policy orientation
With the rapid development of the pressure sensor chip industry, some development problems also arise, such as disorderly competition in the industry, and the product quality is difficult to guarantee. In order to ensure the stable development of the industry, the relevant departments have issued some relevant policies to prevent the development of adverse factors to a certain extent. The "12th Five Year Plan" of pressure sensor chip industry spans 2011-2015, which will be in the form of industry strategy declaration for this rising oriental country Pressure sensor chip Step up the industry in the next five years. The "Twelfth Five Year Plan" will be a key period for "made in China" to realize industrial transformation and leapfrog upgrading. Chinese pressure sensor chip enterprises need to take precautions and formulate scientific development strategies and implementation plans for the next five years.
During the 12th Five Year Plan period, the industry development should adhere to the following principles:
Independent innovation. Based on original innovation, integrated innovation and re innovation through introduction, digestion and absorption, we should take independent innovation as the strategic basis for the development of high-tech industries, improve the technological innovation system, strengthen the dominant position of enterprises in technological innovation, cultivate core technologies and independent brands of independent intellectual property rights, and strive to enhance the ability of independent development of industries.
Focus on application. Based on the needs of economic and social development, we should develop key technologies, develop major equipment, strengthen popularization and application, promote economic and social informatization, improve production and management methods, reduce resource and energy consumption, reduce environmental pollution, and promote industrial restructuring and technological progress.
Industrial agglomeration. Based on the optimal allocation of resources, we should take industrial agglomeration as a strategic approach to industrial development, accelerate the industrial agglomeration to the advantageous regions and major central cities, play a leading role in radiation, further extend and improve the industrial chain, and form an industrial cluster with strong competitiveness.
Development scale. Based on accelerating the cultivation of new industrial growth points, we should take the industrialization of independent innovation achievements as the strategic breakthrough of industry development, improve the industrialization environment, develop venture capital, cultivate high-tech enterprise groups and well-known brands with strong competitiveness, open up emerging markets, promote the transformation of scientific and technological achievements into real productivity, and realize sustained and rapid industrial growth.
International cooperation. Based on making full use of global resources, expanding international cooperation is a strategic choice for industry development. We should guide foreign investment, strengthen technical cooperation, develop key industries, open up overseas markets, promote transnational operation, cultivate international industrial supporting system, and participate in international division of labor at a higher level and in a wider range.
"12th Five Year Plan" forecast of pressure sensor chip industry
According to the research and interpretation of the industry policy, the goal of the next five years is to complete the transformation of China's pressure sensor chip industry competitiveness from manufacturing competitiveness to trade competitiveness. In the foreign market, the independent brand must enter the traditional market, so as to form international competitiveness and change the image of low price.
2、 Development of related industries
Sensor is the human touch to explore the nature, which provides conditions and basis for people to understand and control the corresponding objects. In the information society, in order to promote the development of social productivity, people need to use sensors to detect a lot of non electrical information. Sensors are the key technology devices of process automatic control system and information system, and their technical level will directly affect the level of automation system and information system. At present, there are more than 20000 kinds of sensors in the world
The volume of sensor is becoming smaller and smaller, and the technology of micro sensor is developing rapidly. With the development of semiconductor integration technology and micromachining technology, micro sensors have been developed rapidly. Micro sensors have the advantages of small size, small power consumption, fast start-up, low cost, high measurement accuracy and sensitivity, and easy to realize digitization and intelligence. Moreover, they are accurate, repeatable and easy to integrate. Therefore, they will be widely used in engineering, biological and aviation fields.
In addition, the micro sensor can also realize the integration of sensor and measurement circuit, which can be used for measurement in harsh environment. For example: capacitive pressure sensor is such a new type of sensor. In this kind of micro sensor, the measuring circuit, the reference capacitance and the measuring capacitance are made together. At zero voltage, the values of the reference capacitance and the measuring capacitance are exactly the same, and they are placed in the same pressure field, so that the capacitance value of the reference capacitance does not change with the change of the pressure.
3、 Industry technology development
New physical phenomena, chemical reactions and biological effects are used as the sensor principle. Sharp has successfully developed a high temperature superconducting magnetic sensor using superconducting technology, which is a major breakthrough in sensor technology, and its sensitivity is second only to superconducting quantum interference devices. Its manufacturing process is much simpler than that of superconducting quantum interference devices. It can be used in magnetic imaging technology: when antibody and antigen meet and compound on the electrode surface, the electrode potential will change, which can be used to make immunosensor. The immunosensor made of this antibody can detect the presence of the antigen in the organism. The University of California has developed this sensor.
Use new materials. With the development of new materials and sensors, some sensors are emerging. Polymer can absorb or release water molecules in proportion with the relative humidity of the surrounding environment. The dielectric constant of polymer is small, and water molecule can improve the dielectric constant of polymer. The polymer dielectric is made into a capacitor to measure the change of capacitance, and the relative humidity can be obtained. Based on this principle, a polystyrene film temperature sensor by plasma polymerization is made. Ceramic capacitive pressure sensor is a dry pressure sensor without intermediate liquid. It adopts advanced ceramic technology and thin film electronic technology. The annual drift is less than 0.1% F.S. and the temperature drift is less than 0.5% / 10K. It has stable performance and strong overload resistance. Optical fiber is a major breakthrough in the application of optical fiber. Temperature, pressure, electric field, magnetic field and other environmental conditions will cause changes in the intensity, phase, frequency and polarization state of optical fiber transmission. By measuring the change of light wave, we can know the size of temperature, pressure, electric field, magnetic field and other physical quantities that lead to these changes. Harbin Institute of technology has successfully developed a "new type of intrinsic semiconducting polymer pressure and temperature dual parameter sensor". The free radical polymer used is a kind of polymer material with high pressure-sensitive coefficient. The temperature sensitive drift of force sensitive chip is controlled within 50 / 00 within a certain range of parameters by adjusting the doping process parameters of planar process by surface treatment.
Using new processing technologies. Some processing technologies in semiconductors, such as oxidation, photolithography, deposition, planar electronic technology, conductive corrosion of various phases, evaporation and sputtering films, have been introduced into sensor manufacturing, and various new sensors have been produced. Such as the use of semiconductor technology to manufacture silicon micro sensors: the use of thin film technology to produce a rapid response of gas sensors, humidity sensors: the use of Pressure sensor fabricated by sputtering thin film process Etc. Yokogawa company of Japan uses various guided corrosion technologies to carry out high-precision three-dimensional machining, and makes all silicon resonant pressure sensor. The silicon micro pressure sensor developed by SMI company in the United States, after many times of etching, Wheatstone bridge is made on the silicon diaphragm. When the force is exerted on the top of the silicon diaphragm, it will deform, the resistance will produce piezoelectric effect and lose balance, and output the electric signal proportional to the pressure. This kind of silicon micro sensor is the advanced technology of sensor development.
The development of sensors has laid a foundation for the development of intelligent sensors, which is also the general trend of sensor development. First of all, the advantage of integrated sensor is that the traditional sensor can not achieve. It is not only a simple sensor, but also integrates the components in the auxiliary circuit with the sensor elements on a chip, which makes it have the functions of calibration, compensation, self diagnosis and network communication. The intelligent sensor, a kind of sensor with microprocessor, is the product of the combination of microcomputer and sensor technology. It has the functions of detection, judgment and information processing. Compared with the traditional sensor, it has many advantages: it has the function of judgment and information processing, can correct the measured value and compensate the error, so as to improve the measurement accuracy: it can realize multi-sensor and multi parameter Measurement: it has the function of self diagnosis and self calibration to improve the reliability; the measurement data can be accessed and used conveniently; there is a data communication interface, which can directly communicate with the microcomputer.